Kofloc Japan Mass Flow Controller | Model 3660

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1.00 KGS
Calculated at Checkout

The Model 3660 Series Mass Flow Controller has been developed with the focus on compactness and low cost in mind. These robust Mass Flow Controllers offer a wide range of diverse applications, including laboratory research and development to standard mass flow control for various types of analysers and vacuum systems. Wide variety of options are available.
We can also provide you with a 1-8 Channel Power Supply and Readout called the SERO-2000S with 2m cable


  • Equipped with an advanced flow sensor of constant-current temperature difference detection type to ensure high-speed response
  • Use of a normally closed valve to ensure safety
  • High reliability guaranteed using a solenoid actuator
  • Low differential pressure type control available for combustible gases (LP option) 






Flow range (N2 equivalent,
20℃/1 atm)

10 SCCM–20 SLM (freely




Thermal mass flow sensor


Valve type

Proportional solenoid valve (closed when not energized)


Control range

2–100% (F.S.)




2 sec. or less (0–100% within
±2% typical)




±1.0% F.S. (25℃)



Temperature coefficient

±0.1 F.S./℃ (15–35℃)






Operating differential

F.S. ≤ 5 SLM: 50–300 kPa (G)



F.S. > 100 SLM: 50–300 kPa (G)



Option: Medium differential pressure (MP) and low differential
pressure (LP) specifications are available.


Allowable operating pressure

500 kPa (G) or less


Proof pressure

980 kPa (G)


Leak rate

1 × 10-8 Pa・m3/s or less (excluding permeation of He)


Allowable ambient temperature



Allowable ambient humidity

10–90% (No condensation allowed)


Materials of parts in
contact with gases

Body: SUS316


Valve seat: FKM (option: CR or NBR)


Sealing: FKM (option: CR or NBR)


Electric connection

Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)


Flow rate input signals

0–5 VDC (Input impedance: 1 MΩ or more)


Flow rate output signals

0–5 VDC (External load resistance: 250 kΩ or more)


Required power supply

+15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA



Standard: 1/4SWL
Option: 1/8SWL 1/4VCR RC1/4, etc.




Approx. 1000 g



Note: Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us. 


  • Air sampling
  • Analyzer component
  • Bioreactor
  • Biotechnological process
  • Burn control
  • CCFL manufacturing
  • Chamber pressure control
  • Chemical process
  • Environment monitoring 
  • Electronic device manufacturing
  • Food production
  • Fuel cell testing
  • Fermentation process
  • Gas blending
  • Gas distribution
  • Gas flow monitoring
  • Gas generation
  • Industrial furnace
  • Leak testing
  • Pharmaceutical process
  • Pollution monitoring
  • Process flow control
  • R&D
  • Solar power element manufacturing
  • Secondary calibration reference
  • Semiconductor process
  • Surface treatment process
  • Thermal flame spray
  • Thin film manufacturing
  • Physical Vapor Deposition